A Study of Gauge Repeatability and Reproducibility of The Back-End Semiconductor Lead Inspection System
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Keywords

Vision inspection system
GR & R
lead inspection system

How to Cite

Hawary, A. F., Hoe, Y. H., Bakar, E. A., & Othman, W. A. F. W. (2019). A Study of Gauge Repeatability and Reproducibility of The Back-End Semiconductor Lead Inspection System. ROBOTIKA, 1(2), 1-6. Retrieved from http://technical-journals.org/index.php/ROBOTIKA/article/view/35

Abstract

Vision inspection systems in semiconductor industries play a major role in the productivity and the quality of the product due to its precise, micro-size and repeating tasks. This is in line with the industrial revolution 4.0 that almost every industry is talking about. It is not about to replace the human operator totally, but rather to design a system or equipment where its performance has less dependent on the operator skills. One of the methods to measure the performance of the equipment is through the gauge repeatability and reproducibility (GR&R). This study focuses on the back-end process in an integrated chip (IC) semiconductor industry that involves lead and marking inspection of the chip using our inhouse developed vision system. The inspection is performed after the unit has passed the functionality test. The inspection parameters include marking defects, package defects, and lead defects. Out of these three defects, we focused on the lead length defect in which the inspection system would measure the lead length for 10 sample units of SOT89 package by three different operators from different shifts. The result shows that the value of GR&R is 0.037 (25.51%) which is considered within the acceptable range of less than 30% and hence the vision inspection system is fit to release to production use.

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